| 摘要 |
PURPOSE:To form a super hard carbon-base thin film having diamond structure with good reproducibility in the stage of forming said film by a low-pressure CVD method by mixing a slight amt. of gaseous AlCl3 with conventional gaseous H2-CxHy and using the same in an activated state. CONSTITUTION:A base body consisting of various metals and alloys is put in a quartz tube and is heated to 300-1,100 deg.C by an induction coil, etc. Gaseous AlCl3 is mixed with the gaseous mixture composed of H2 as an essential component and gaseous CxHy such as CH4 in such a way that Al is incorporated therein at 0.001-0.1 by atom ratio with respect to the content of carbon. Such gaseous mixture is activated by a thermionic radiation method, high-frequency plasma method, etc. Such activated gaseous mixture is introduced onto the heated base body under 0.1-100Torr pressure, by which the thin film of the material having the diamond structure of carbon is formed with good reproducibility in a short time on the surface of the base body. |
