| 摘要 |
<p>PURPOSE:To obtain a color filter free from deterioration in color by forming an inorg. pigment film by a high-frequency sputtering method on a glass base plate or plastic base plate. CONSTITUTION:A photoresist film 2 is coated on the surface of a glass (or plastic) base plate 1 and is partly windowed by a photolithographic technique. A pigment film 3 is formed thereon by a sputtering method using an inorg. pigment such as iron oxide red, chromium oxide, cobalt blue or the like as a target. The film 2 and the pigment film thereon are removed by a soft-off method. The three primary color (R, G, B) filter having no deterioration in color is obtd. by repeating thrice the above-mentioned operation.</p> |
