| 摘要 |
<p>PURPOSE:To make it possible to perform highly sensitive measurement, without the effects of transmission to a sample and attenuation at the sample, by using visible light or ultraviolet light for incident light, and making the light incident at a specified viewing angle with respect to the surface of the sample. CONSTITUTION:When a sample 1 is a non-light transmitting material such as a semiconductor and metal, a viewing angle theta is made to be less than 5 deg.. When the sample is a light transmitting material such as glass, the viewing angle theta is made to be less than 1 deg.. Then 90% or more of incident light 2 is reflected from the sample 1. These conditions are used. An incident light supplying part A is composed of a variable wavelength light source 15, whose wavelength range of visible or ultraviolet light is from about 200nm to about 700nm, a polarizer 16 and pinholes 17 and 18. A sample part B is composed of a vacuum container 22 provided with optical windows 19 and 20 and a sample holding table 21. A reflected light detecting part C is composed of a pinhole 23, a polarizer 24, and a light detector 25. By all these parts, an oblique incidence and reflection type spectroscope is constituted. At this time, the viewing angle theta of the incident light 2 to the sample 1 is set so as to satisfy the above described conditions.</p> |
