| 摘要 |
PURPOSE:To suppress optical damage and to improve the efficiency of optical modulation by providing separately a light guide part for inputting and outputting light and a light guide part for optical modulation on a substrate, and giving each of them a different optical waveguide characteristic. CONSTITUTION:The light guide part 15c for optical modulation or optical deflection is formed by diffusing internally titanium on the substrate 1 of an optical waveguide made of lithium niobate, and light guide parts 15a and 15b for inputting and outputting light are formed at the remaining parts separately by ion exchange. Then, a comb-shaped electrode 9 is formed. Thus, input/output parts for light are made of the light guide parts 15a and 15b having high optical damage resistance and an optical modulation part is made of the light guide part 15c superior in modulation characteristic to improve the resistance to optical damage and also improve the modulation efficiency. |
