发明名称 Process for producing photo-etching masks
摘要 In a process for producing photo-etching masks, in particular for flexible film circuits with resistor networks, enlarged drawings of the configuration of the resistor film are first made, the enlargement factor being chosen in such a way that, with a constant camera setting, the 1:1 mask for the resistor network is produced in two steps. The drawings obtained in this way are reduced in a first step by photographic techniques and then mounted in an assembly master. The photo-etching mask is then reduced to 1:1 in a second step by photographic techniques with the camera setting unchanged. <IMAGE>
申请公布号 DE3345257(A1) 申请公布日期 1985.06.27
申请号 DE19833345257 申请日期 1983.12.14
申请人 SIEMENS AG 发明人 VETTER,HARALD,ING.
分类号 G03F1/00;H05K1/16;H05K3/00;(IPC1-7):G03F1/00;H05K3/06 主分类号 G03F1/00
代理机构 代理人
主权项
地址