| 摘要 |
PURPOSE:To measure a minute gap highly accurately based on the position of a converged light spot, by coupling two optical systems of a downward-light-projecting type microscope system and a monochromatic light converging type minute-gap measuring system. CONSTITUTION:A downward-light-projecting type microscope system 10 is constituted of an X-Y moving table 5, an objective lens 6, a half mirror 7, an eyepiece lens 8, and a downward light projecting source 9. A minute-gap measuring system 15 is composed of a condenser lens 11, a half mirror 12, a light-intensity detecting element 13, and a monochromatic light source 14. Both systems 10 and 15 are coupled by a mirror or prisim 16. Surface of a light reflecting body 2 is observed by applying the white light from the downward light projecing source 9. At the same time, the position of the converged light spot from the monochromatic light source 14 is determined. |
