发明名称 PRODUCTION OF SEMICONDUCTOR CRYSTAL
摘要 PURPOSE:To reduce crystal grain boundary contained in the interior and improve the quality of the crystal, by preparing a crystal ingot, and heat-treating the ingot in a vapor atmosphere of component elements contained in the crystal ingot. CONSTITUTION:A raw material element is sealed in a quartz ampule under reduced pressure, and the whole is melted in a heating furnace and then passed through a zone having a temperature gradient in the furnace to grow crystals from the tip part and prepare a crystal ingot 13, e.g. cadmium tellurium crystal ingot. The resultant crystal ingot 13 is then contained in a vacuum closed vessel 11 having a temperature gradient, and a component element 15, e.g. cadmium, contained in the crystal ingot 13 is simultaneously contained in the high-temperature side of the closed vessel 11. The crystal ingot 13 is then heat-treated in a vapor atmosphere of the component element 15 to give the aimed semiconductor crystal with little crystal grain boundary contained in the interior thereof.
申请公布号 JPS60118700(A) 申请公布日期 1985.06.26
申请号 JP19830227460 申请日期 1983.11.30
申请人 FUJITSU KK 发明人 ITOU MICHIHARU;YOSHIKAWA MITSUO;UEDA TOMOSHI
分类号 C30B29/48;C30B33/00;C30B33/02;H01L21/02;H01L21/208 主分类号 C30B29/48
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