| 摘要 |
PURPOSE:To reduce a slit width, and to raise a resolution by forming a slit for forming an optical signal of a rotary slit plate, by means of photoetching, on a metallic thin film laminated on a transparent plastic film. CONSTITUTION:A rotational displacement is transferred to a rotary slit plate 2 by a revolving shaft 1, and by a thin film slit 9 in a rotary slit 3 and a fixed slit 5 of a fixed slit plate 4, a light of a luminous body 6 intermits and becomes an electric signal by a photodetecting body 7 being an optical-electric transducer. A rotary slit 3 is formed by means of photoetching on this rotary slit plate 2, and a transparent plastic film 8 is made to adhere to the whole surface. On the outside surface of the transparent plastic film 8, aluminum is vapor-deposited by the same method as the fixed slit plate 4, and a thin film slit 9 is formed by means of photoetching. |
