| 摘要 |
PURPOSE:To reduce the influence of digital noises and perform highly accurate and highly sensitive testing operations, by transmitting a control signal and measurement signal between a test module and controller after the signals are converted into optical signals. CONSTITUTION:A program prepared at an operation terminal TRM is file-managed and, at the same time, compiled by a test system manager TSM, and then, sent out to a test system controller TSC. From the test system controller TSC inherent data of each test module TML are sent out to each module controller MDC through a data bus DB and each module controller MDC sets data for setting the operation of each test module TML in each test module TML through each opto-coupler OC. Each test module TML executes a prescribed testing operation to an LSI installed to a test heat THD in accordance with a synchronizing signal from the test system controller TSC and the test result is read by each module controller MDC through the opto-couplers OC.
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