| 摘要 |
PURPOSE:To enable local analysis of a surface by X-ray excitation of a thin sheet-like non-conductive sample by impressing a voltage to an electrode disposed on the rear of a sample, irradiating X-rays to the surface of the sample and measuring the energy of the photoelectron released from the sample surface. CONSTITUTION:When a rotating angle of a probe 6 is fixed at theta and an electrode 19 to be impressed with a voltage is scanned in a direction (t), the potential in the part along the straight line L of the sample surface on the electrode 19 changes and the L is scanned in the direction (t). The photoelectron energy from the surface of the sample 5 by the X-rays irradiated uniformly to the surface of the sample 5 by an X-ray tube 4 in this stage is shifted only in the photoelectron released from the part along the straight ling L as compared to the other part. The photoelectron having the shifted energy is separated from the other photoelectron and is conducted to a detector 3. The resultant data is subjected to arithmetic processing of computer tomography, by which the two-dimensionally distributed image of the sample surface is obtd. The resolution of the element distribution on the thin sheet-like non-conductive material surface is thus accomplished with high accuracy. |
