| 摘要 |
PURPOSE:To omit the ON and OFF operation of a detecting electrode and to facilitate signal detection, by forming a potential barrier at a part adjacent to the first detecting electrode beneath an injection electrode, detecting a displacement current caused by charge transfer, and avoiding the charge injection under the detecting electrode. CONSTITUTION:A fist detecting electrode 11 is located at the central part of a unit cell. A second injection electrode 2 is provided so as to surround the electrode 11, and a Y bus is formed. The thickness of an insulating film 14 is made large at a part adjacent to the detecting electrode 12 beneath the injection electrode 12, so that potential barrier is formed. The detecting electrode is commonly connected in the longitudinal direction (X direction) and the injection electrode 12 is commonly connected in the lateral direction (Y direction). An insulating film 16 is formed on the entire surface of, e.g., a substrate 10. The detecting element 11 is formed by a light transmitting material. Then, the insulating material 14 for forming a potential barrier is formed on a potential barrier part 13. Then the injection electrode 12 is formed. After the entire surface is coated by an insulating film 17, a contact hole 18 is formed, and a detecting bus 15 is connected, thereto. |
