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发明名称
PROTECTION OF SILICON SURFACES DURING SILICON CARBIDE DEPOSITION
摘要
申请公布号
CA781889(A)
申请公布日期
1968.04.02
申请号
CAD781889
申请日期
申请人
DOW CORNING CORPORATION
发明人
LEIGH J. HAGA;THOMAS N. TUCKER
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