| 发明名称 |
FORCE SENSORS |
| 摘要 |
<p>Force Sensor A force sensor comprising a field effect transistor structure (1, 3, 5, 7, 15) with a cantilevered beam (11a) of piezoelectric material overhanging the channel region (9), between the gate electrode (15) and the channel region (9).</p> |
| 申请公布号 |
CA1189350(A) |
申请公布日期 |
1985.06.25 |
| 申请号 |
CA19830421942 |
申请日期 |
1983.02.18 |
| 申请人 |
GENERAL ELECTRIC COMPANY, PLC (THE) |
发明人 |
READ, EILEEN;MCCAUGHAN, DANIEL V. |
| 分类号 |
B06B1/06;G01L1/18;H01L29/84;(IPC1-7):G01L1/16 |
主分类号 |
B06B1/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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