| 摘要 |
PURPOSE:To perform the inspection of the surface detect of a spherical article with a single image pick up by arranging a line sensor at an angle with respect to an image formation lens and an optical axis and in a rotatable manner in an apparatus for inspecting defects of an LED. CONSTITUTION:A line sensor 6 is turned by 360 deg. about the optical axis in the direction of the arrow with a line sensor rotation mechanism to pick up an image and the entire surface of a spherical LED sample 4 can be picked up its image with the line sensor 6. Here, when a flaw 9 exists in a rectangular on OC, the flaw 9 appearing on the line sensor 6 is larger in the width toward the center. Here, the central part of the flaw 7 on a circumference separated by the distance (d) from the center O of the LED sample 4 appears on the line sensor 6 as image magnified 1/d times. Therefore, to correct this output image, the output image obtained is multiplied by (d). Thus, the surface defect inspection of spherical article can be accomplished by a single image picking up thereby eliminating the need for such as complicated operation as combining images obtained by several image picking up into a single picture. |
