发明名称 METHOD OF MAKING IMAGE FORMATION RESIST LAYER AND DRY FILM AND RESIST SUITABLE THEREFOR
摘要 In the production of imagewise structured resist layers, for example for the manufacture of printed circuits, electronic components, soldering masks, etc., by application, onto a substrate, of a positive-working resist layer (R) which can be rendered soluble by exposure to actinic light, imagewise exposure of the resist layer (R) to actinic light and removal of the exposed parts of the layer by washing out with a developer, the photosensitive resist layer (R) used, in particular in the form of a dry film resist, consists of two or more strata (S) which posses different basic solubilities, at least the upper stratum (U) being photosensitive and the lower stratum (LS) having a higher basic solubility in the developer than has the upper stratum (U).
申请公布号 JPS60117247(A) 申请公布日期 1985.06.24
申请号 JP19840228068 申请日期 1984.10.31
申请人 BASF AG 发明人 HANSU SHIYUPU;ARUBERUTO ERUTSUAA
分类号 G03F7/26;G03C1/72;G03C5/00;G03F7/039;G03F7/095;H05K3/00;H05K3/34 主分类号 G03F7/26
代理机构 代理人
主权项
地址