| 摘要 |
PURPOSE:To prevent a wafer from damage when contacting, by in a wafer sensor used in a wafer transporting operation, constituting a contactor detecting arrival of the wafer with a roller. CONSTITUTION:A roller 6 is located in the middle of transporting belts 2 extending in 2 parallel lines. The roller 6 is so arranged that it sticks out of the surface of the belts by repulsion force acting between magnets 9 and 11. When a wafer 1 passes top of the roller 6, the roller 6 rotates in contact with the wafer 1 and it is pressed down by the weight of the wafer 1. By this, as a through hole 8 perforated in a supporting column 7 supporting the roller and an optical axis 10 of the sensor 5 are brought to a perfect alignment, the sensor 5 detects arrival of the wafer. A threaded portion 12 is meant for adjusting a distance D between forces upward of the roller 6 and by this adjustment, the upward force of the roller 6 can be adjusted to the optimum value corresponding to the wafer weight.
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