发明名称 METHOD FOR FORMING CONTINUOUS THIN FILM
摘要 PURPOSE:To obtain a thin film for vertical magnetic recording medium which has a high coercive force in the direction vertical to the film surface, by forming the thin film by adhesion in the state where a part of a high polymer film base material existing in the thin film forming position is not brought into contact with carrying and supporting mechanisms of the high polymer film base material. CONSTITUTION:Main rolls 4a and 4b have flange parts 11 and 12 in both sides parts and are recessed in center parts 13. Consequently, spaces are made between center parts of main rolls 4a and 4b and a high polymer film base material 2, and the area of sputtering where a film forming material is supplied from magnetron sputtering targets 5a and 5b is limited to an area 14 indicated by oblique lines on center parts 13 of main rolls 4a and 4b, and the high polymer film in the area 14 is not brought into contact with main rolls 4a and 4b. Thus, conduction of heat from the base material 2 is held down only to heat radiation and heat conduction in the lengthwise direction of the base material 2, and the base material 2 is heated to an adequate temperature when the thin film is formed by sputtering or the like. Consequently, the recording film having a required coercive force Hc in the direction vertical to the film surface is formed in production of the vertical magnetic recording medium.
申请公布号 JPS60117420(A) 申请公布日期 1985.06.24
申请号 JP19830224088 申请日期 1983.11.30
申请人 TOSHIBA KK 发明人 NISHIKAWA REIJI;YAMADA TAKASHI;NISHIYAMA YASUHIKO
分类号 C23C14/56;G11B5/85;H01F41/14 主分类号 C23C14/56
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