| 摘要 |
PURPOSE:To improve the quality of printing while ensuring a smaller size and a high reliability by making common conductor and a common drive signal line of a thick film to be a lower resistance while an individual drive signal line and a control signal line is made of a thin film to achieve a high density wiring. CONSTITUTION:On the surface of a substrate made of ceramics or the like, first a resistance heat generating body 2, then, a common conductor 31 and a common drive signal line EX1 and finally, an individual drive signal line A1 and a control signal line B1 are formed. The common conductor 31 and the common drive signal line EX1 are formed by thick film printing technique such as screen printing at the thickness of 5-30mum to make the electric resistance so low that a large voltage drop will not occur even when a relatively large current flows. This can maintain heat generated from a heat generating body 2 invariably at a specified temperature. The signal lines A1 and B1 are formed by thin film technique such as evaporation to make the thickness about 2mum thereby enabling a higher integration at a high accuracy regardless of even higher wiring density. |
