| 摘要 |
PURPOSE:To make positioning efficient by vidually detecting the positional shift between a charged particle beam axis and the central axis of an electro-optic system at two or more places in the axial direction of a vacuum container central axis that connects a beam source and a target, from the outside of the vacuum container. CONSTITUTION:A laser oscillator 23 is oscillated and a laser beam 28 is guided to a vacuum chamber 15 from a window 20 by adjusting mirrors 21 and 22 and then is reflected by a mirror 19. In addition, its optical axis is aligned with the central axis of an electro-optic system by adjusting a manipulator 18. When they are aligned, the positional shift of a beam axis can visually be detected observing from windows 24 to 26 that the tip of the laser beam 28 reaches any portion of an ion source 1 side while peeping into the inner part of a vacuum chamber 15. |
