| 摘要 |
PURPOSE:To make it possible to display the flow rates at various standard- states, by specifying the standard state by a standard state selecting means, and displaying the flow rate at that time on a flow rate display means. CONSTITUTION:Gas is inputted to an inlet port 2 of a mass flow controller 1 to be calibrated and guided to a volume flowmeter 4 using a soap film through an outlet port 3. A flow rate Q0 at 1 atmospheric pressure and T0 deg.C under the standard state becomes Q0=Q273+T0/273+T.P, where P is an atmospheric pressure at the time of measurement and T deg.C is a temperature. The flow rate under the standard state specified by a standard state selecting switch 6 is computed by an operation control circuit 5 and displayed on a display device 7. The operation control circuit 5 always monitors the standard state selecting switch 6. When the specified state is changed, the flow rate under the specified standard state is displayed on the display device 7 at any time. |
