| 摘要 |
<p>PURPOSE:To set up the spectral transmittion characteristics of a color filter pattern colored with the 3rd color by controlling the film thickness of an overlapped part of a transparent film colored with the 2nd color to a transparent film colored with the 1st color and an unoverlapped part independently. CONSTITUTION:A Cy-colored film pattern 2 which is colored with Cy, the 1st color, an anticoloring intermediate film 3 and a transparent photosensitive film 4 are formed on a substrate 1 successively and then the whole surface is exposed through a mask 7 having a prescribed pattern from the alternate long and short dash line arrows L so that a part to be a Ye filter pattern colored with Ye, the 2nd color, is left. Then, the photosensitive film 4 is developed to left a photosensitive film pattern 4a so that the pattern 4a is not overlapped to the Cy-colored film pattern 2. Subsequently, a photosensitive film 8 is formed on the whole upper surface again so that the thickness of the film 8 on the Cy-colored film pattern 2 becomes equal to the thickness of the photosensitive film pattern 4a. Then, the whole surface is exposed through a mask 9 having a prescribed pattern so that a part constituting a G film pattern colored with the 3rd color G is left so as to be overlapped to the Cy-colored film pattern 2. Then, the photosensitive film 8 is developed to leave a photosensitive film pattern 8a so as to be overlapped to a part of the Cy-colored film pattern 2. Subsequently, both the photosensitive film patterns 4a, 8a are colored with Ye.</p> |
