| 摘要 |
PURPOSE:To execute automatic exchange of a plurality of masks for continuous inspection of mask and efficiently load or unload the mask one by one by providing single-mask taking-up mechanism which receives a mask at the predetermined position and sends it to the transfer mechanism. CONSTITUTION:A transfer mechanism 31 consisting of conveyor, etc. is provided between a stage 3 and a mask holder 2 and a every mask taking mechanism which sets or resets the mask 1 on a belt of transfer mechanism 31 is provided at the center of transfer mechanism 31. In the case of executing defect inspection of a plurality of masks 1, a desired mask is selected from a plurality of masks 1, it is pushed on the belt of transfer mechanism 31 by a pushing arm 33 and then transferred on the stage 3. Finally it is set on the predetermined position on the stage 3 by the moving mechanism 32. The mask 1 being set is set to the defect inspection using a device indicated in the figure. The mask 1 completing the inspection is returned to the vacant region in the holder 2 by the transfer mechanism 31 and another mask 1 is selected. Transfer, defect inspection and retransfer of masks 1 are carried out by the similar operations. |
