发明名称 METHOD AND DEVICE FOR CHECKING UP OPERATION OF DETECTING DEVICE USED FOR SEMICONDUCTOR FABRICATING APPARATUS
摘要 PURPOSE:To make it possible to easily find out a detecting device wherein any abnormality occurs, by displaying the ON-OFF state of the detecting device in accordance with the corresponding number, mark or the like of the detecting device displayed in a display unit. CONSTITUTION:An operation signal (a) enters a control means 4 of a controlling computer 3 through a signal conversion circuit 2. In the control means 4, the depression of a button C in an operation panel 1 is transmitted to a selecting means 5 by an operation unit signal (c). The selecting means 5 delivers a selection signal (d) to a memory means 6 to call the corresponding number of a detecting device employed in a lead frame supply unit, which is stored beforehand in the memory means 6. On the other hand, the selecting means 5 delivers a selection signal (f) to a signal convertion unit 8 to call a signal corresponding to the detecting device employed in the lead frame supply unit, i.e. the detecting device whose number has been called out of the memory means 6 by the selecting means 5. The selecting means 5 makes a monitor 11 display, through a character generating circuit 10, both the corresponding number of the detecting device called out of the memory means 6 and the signal called out of the signal conversion unit 8 in a corresponding way respectively.
申请公布号 JPS60115236(A) 申请公布日期 1985.06.21
申请号 JP19830221994 申请日期 1983.11.28
申请人 TOUSHIBA SEIKI KK 发明人 AMAGISHI HIDEO
分类号 H01L21/52;H01L21/58;H01L21/60;H01L21/66 主分类号 H01L21/52
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