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发明名称
PROCEDE D'ATTAQUE PAR L'HYDROGENE DE SEMICONDUCTEURS ET D'OXYDES DE SEMICONDUCTEURS
摘要
申请公布号
FR2501909(B1)
申请公布日期
1985.06.21
申请号
FR19820003831
申请日期
1982.03.08
申请人
WESTERN ELECTRIC CY INC
发明人
分类号
H01L21/302;H01L21/306;H01L21/3065;H01L21/311;H01L21/3213;(IPC1-7):H01L21/306;H01L27/00
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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