POLISHING SYSTEM AND POLISHING CLOTH REPLACING METHOD ON SURFACE PLATE

摘要

PURPOSE:To simplify the replacing work of polishing cloth without dismantling the upper surface plate by forming the polishing agent receiving port of upper surface plate in step to have large diameter then sticking polishing cloth having no opening and boring a polishing agent feeding port having small diameter from the large diameter section. CONSTITUTION:In order to replace plishing cloth 3 sticked onto an upper surface plate 1, old polishing clotch 3 is first peeled from lower plate 41 then new polishing cloth 3 having no opening is sticked. Then a cutter receiving member 49 made of wood or plastic is mounted on the lower surface plate 2, and a boring tool 50 is inserted into the large diameter section 44a from the receiving port side of feeding port 44 of upper surface plate 1 previously removed of polishing agent feeding coupling 45 then the end of said tool 50 is pressed with hand thus to bore a feeding port 33 through the polishing cloth 3. In such a manner, replacing of polishing cloth and boring of feeding port can be done without dismantling the upper surface plate while boring dust can be removed easily through large diameter section resulting in improvement of workability and maintaining of high accuracy.