| 摘要 |
PURPOSE:To operate ion pumps in an atomic beam pipe stably by changing over a power supply on the primary side for a power supply for a plurality of the ion pumps while being interlocked with informations detected by an abnormality detecting circuit. CONSTITUTION:Two ion pump driving sources 31, 32 are disposed, and output voltage from each power supply 31, 32 is detected by a voltage detecting circuit 35 through rectifiers 33, 34. When output voltage from the power supply 31 is abnormal, a changeover circuit 36 is operated by an information regarding the abnormality of the output voltage, the power supply 32 and a primary side input power supply 37 are connected, and the power supply 32 is operated. Accordingly, since predetermined voltage is applied to an ion pump 22 from the power supply for driving the ion pump, output voltage therefrom displays a normal value at all times, the pump 22 is operated stably, and the reliability of the operation of an atomic beam pipe can also be kept high. |
