METHOD OF PRODUCING A CARBON-CONTAINING LAYER, CARBON-CONTAINING LAYER, USE OF CARBON-CONTAINING LAYER AND PROCESS FOR THE PRODUCTION OF A CARBON-CONTAINING LAYER

摘要

A carbon-containing layer is produced on a substrate by means of sputtering. The carbon-containing layer is applied with good adhesion to nearly any substrate, is a very thin layer, and also exhibits a low conductivity. Parts of hydrocarbon molecules or hydrocarbon molecules are both incorporated into the carbon-containing layer during sputtering. The carbon-containing layer adheres well to nearly any substrate, is nearly scratch-proof, and helps avoid charging and contamination upon bombardment with charged particles.