| 摘要 |
PURPOSE:To manage with a high accuracy a thickness of a tip of a magnetic film to a prescribed thickness by dividing into a thickness direction of the magnetic film, and forming it by laminating successively a prescribed shape. CONSTITUTION:A magnetic film of superpermalloy is spattered onto a lower insulating film 3, and a magnetism leakage preventing magnetic film 4-1 is formed. A prescribed shape is patterned by a resist 11 on the magnetism leakage preventing magnetic film 4-1. The magnetism leakage preventing magnetic film 4-1 is formed by performing an etching and peeling off the resist 11. A magnetic film of superpermalloy is spattered onto the magnetism leakage preventing magnetic film, and a tip part magnetic film 4-2 is formed. The final shape of the magnetic film is patterned by a resist 12 on said film. The tip magnetic film 4-2 is formed by peeling off the resist 12 after the etching. |
