| 摘要 |
PURPOSE:To provide a thin film head suitable for high-density recording by providing ruggedness to a thin high-permeability film and decreasing the thickness of the thin high-permeability film core in the part where a coil is formed. CONSTITUTION:A closed magnetic circuit is formed of thin high-permeability films 8 and 9 and 10 acts as a gap part. The film 8 has a U-like sectional shape. A coil 11 is disposed on the inside of the U-shape isolatedly from the others by electrical insulating films 12, 13. The films 8, 9 are manufactured by a thin film forming technique such as vacuum evaporation or sputtering. It is easy to change the thickness of the film 8 according to position. For example, the Co-Zr- Nb thin high-permeability film having U-shape is easily manufacturable by forming the film composed of Co82Zr6Nb12 under the film 8 and the film composed of Co83Zr7Nb10 on said film. |
