| 摘要 |
PURPOSE:To reduce influences of the variance of temperature characteristics of a test module to perform a high-precision and high-sensitivity test operation with a relatively simple constitution by providing a thermometric module which measures the temperature of another test module as the test module. CONSTITUTION:Characteristics of a test module TML1 are varied greatly in accordance with a variance of temperature, and a temperature sensor TS is provided in this module, and data for compensation of chanber of temperature characteristics is stored. Meanwhile, a module TML2 measures the temperature of the module TML1 on a basis of the output signal of the sensor TS and transmits the temperature measured value to a system controller TSC at a prescribed period by a command from the controller TSC. The controller TSC transmits measured temperature data to the module TML1 at every test period. The module TML1 reads out data for compensation of temperature characteristics in accordance with measured temperature data transmitted from the controller TSC and compensates temperature characteristics.
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