| 摘要 |
PURPOSE:To enable analysis of the local part on the extreme surface of a thin- walled nonconductive sample by impressing a voltage to the contact electrode on the rear, shifting the photoelectron spectrum by X-ray irradiation with respect to the spectrum in the other surface part, discriminating both and dividing the position. CONSTITUTION:A voltage is impressed on an electrode 14 in proximity to the local part of a sample 4 having about several tens mu thickness to change to potential in the local part and at the same time X-rays are irradiated from an X-ray gun 6 to release photoelectron which is conducted to an analyzer 8. The photoelectron is subjected to an energy sepn. by an energy scanning circuit 28 and is detected by a detector 10 according to the energy. An energy spectrum A1 is obtd. on an X-Y recorder 30 via an amplifier 26 and a selector switch 34 from the detection signal and the scanning signal. The spectrum A1 is proportional to the size of the local part and is similar to the spectrum A2 obtd. from the other surface. Only the energy corresponding to the impressed voltage appears with a shift. |
