| 摘要 |
An electronic flame off (EFO) electrode used to form balls on bonding wire builds up layers of aluminum oxide during use. The aluminum oxide is removed by moving the EFO electrode next to a cleaning electrode, and causing a glow discharge to pass across the gap between them. The EFO electrode is charged negative with respect to the cleaning electrode, and a noble gas, such as argon, fills the region around the gap. |
