| 摘要 |
PURPOSE:To improve control performance when primary pressure is high by setting the diameter of the valve body of a proportional valve smaller than the effective diameter of a pressure regulating diaphragm mounted between the valve body and the proportional valve. CONSTITUTION:A proportional valve 1 for varying the flow rate of a fluid flowing through a valve body 4 and a plunger 6 of an electromagnetic solenoid 5 fixed to the valve body 4 are installed in such a manner as to interlock with each other. A pressure regulating diaphragm 8 is disposed between the valve body 4 and the proportional valve 1, and the diameters of the valve body 4 and a valve hole 9 are set smaller than the effective diameter of the diaphragm 8. A gas inflow port 2 is disposed below the valve body 4, and a governor valve 12 and a governor diaphragm 3 can be disposed on the lower surface of the valve body 4 through a governor valve sheet 11. |
