| 摘要 |
PURPOSE:To prevent defect of insulation resistance by removing resist after immersing in an etching liquid a composite piezoelectric vibrator in which the resist is coated to the laminated water and cut into a prescribed shape. CONSTITUTION:The laminated wafer 11 is constituted by cladding a piezoelectric element 9 having electrodes 7, 8 at both faces to a metallic plate 10. The resist 12 is applied to the entire circumference of the wafer 11, which is cut into a prescribed form. The result is immersed in the etching liquid so as to remove burr 10a and metallic powder. After etching, the wafer is rinsed by a solvent so as to remove the resist 12. Thus, the stable quality without defect of insulation resistance is obtained. |
