| 摘要 |
PURPOSE:To facilitate manufacture of the arm and transport of a wafer boat by moving the lower surface of the boat setting part present at the front end of a main body of the arm downward from the lower surface of the main body of arm. CONSTITUTION:When a wafer boat 3 is transported into a process tube 5, it is only thing to pay attention to that only lower surface 2a of a boat setting part of a wafer boat supporting arm mignt not in contact with the inner wall of the process tube 5. Because the lower surface 1a of the arm main body 1 of wafer boat supporting arm is located slightly higher than the lower surface 2a of the boat setting part 2, the contact with the inner wall of the process tube 5 is negligible regarding the arm main body 1 at inserting it. Accordingly, regarding the contact of the wafer boat supporting arm with the inner wall of the process tube 5, attention must be paid only to the restricted narrow part and the operation of boat insertion becomes extremely easy.
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