| 摘要 |
PURPOSE:To enable automatic measurement of latch up withstanding value by a method wherein a measuring voltage is applied to an input or output terminal of a semiconductor element to be measured to measure the power source current and the same measurement is done by applying the same voltage after the switching OFF of all power sources. CONSTITUTION:The power source terminal 2 of an element 1 to be measured, a measuring terminal 4 as input or output terminal and an input terminal 9 excluding the terminal 4 are fed with a working voltage, a measuring voltage and an input voltage from a working power source section 12, a measuring power source section 13 and an input power source section 14. Current at the terminal 2 or 4 is measured with a current measuring section 15 and the application and switching OFF of power source section 12, 13 and 14 and the control of the measuring section 15 are done with a control section 11. Then, the working and input voltages are applied and additionally, a measuring voltage is added to measure the power source current. Then the power source is measured by applying all these voltages but the measuring voltage. After the switching OFF of all the voltages, they are applied again to measure current at the terminal 4 and the same measurement is repeated varying the measuring voltage until the results reach the specified value.
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