| 摘要 |
PURPOSE:To prevent adverse effects of dust by its collection in the working space by providing a dust collector in the working space. CONSTITUTION:The dust collector 9 starts to collect the dust 10 floating in the atmosphere surrounding a bonding stage 5 before a wire bonder is operated, and then keeps cleanness of the atmosphere surrounding the bonding stage during the bonding work. Foreign matter such as fragments of a pellet may remain on the stage, and this foreign matter may begin floating during the bonding work by whirl-up by a rising current of air produced with the heating of the stage. Therefore, even during the bonding work, the dust collector comes to collect the dust beginning to float in the atmosphere surrounding the stage. |
