| 摘要 |
<p>PURPOSE:To prevent the deterioration of a polyimide resin layer which contacts with a base plate owing to the base plate in the stage of a high-temp. treatment or the decrease in the layer thickness by providing a thin film layer of metallic oxide between the base plate and the polyimide resin layer. CONSTITUTION:A base plate is a glass base plate, ceramic base plate, etc. and a thin film layer of metallic oxide consisting essentially of, for example, SiO2 as a thin film consisting of the metallic oxide is obt. by adding water to an alcohol soln. consisting essentially of ethyl silicate to hydrolyze the same, coating the resultant alcohol soln. consisting essentially of oligomer on the base plate and drying the coating by heating. A layer consisting of a resin having an imide ring structure and the modified matter thereof is used as the polyimide resin layer. The polyimide resin layer is formed by coating an org. solvent soln. or the org. solvent soln. of the precursor on the base plate on which the thin film of the metallic oxide is formed and drying the coating by heating.</p> |
