| 摘要 |
PURPOSE:To obtain the titled base material doped with a dopant for adjusting the refractive index without containing Cl, by atomizing specific two kinds of alkoxides or alkyl metals with ultrasonic vibration, transporting the resultant mist to a reaction part, and subjecting the mist to the flame hydrolysis reaction. CONSTITUTION:A given pressure is applied from a metering pump 9 to a vessel 10 containing two kinds of alkoxides expressed by the formulas M(OCH3)n (M is Si, Ge, Al, P or B; one or more of Ms are Si; n is an integer) and M(OC2H5)n or two kinds of alkyl metals expressed by the formulas M(CH3)n and M(C2H5)n to transport the two kinds of alkoxides or alkyl metals to an ultrasonic vessel 12. The alkoxides or alkyl metals are then atomized with an ultrasonic vibrator 11, fed to an oxyhydrogen flame burner 3 and subjected to the flame hydrolysis with oxyhydrogen flame to form fine glass particles 4, which are then deposited on a quartz glass seed rod to form a porous base material 5. The resultant base material is then sintered and made transparent. |
