| 摘要 |
PURPOSE:To grasp a straightness shape in detail by installing three detectors which measure the distance from an object of measurement on a detector mount base at equal intervals, obtaining a measured value for every movement distance, and obtaining the straightness shape from data obtained by specific arithmetic. CONSTITUTION:Three displacement detectors A, B, and C are arranged on the detector mount base 3, and measured values are obtained at intervals of movement distance l/2 while the detectors are moved as shown by an arrow. Consequently, straightness errors are calculated at measurement objective points (ai) (i=2, 3, 4...) from one measurement data group of data obtained at the measurement objective points (ai) (i=0, 1, 2...). Similarly, straightness errors are obtained at measurement objective points (bi) (i=2, 3, 4...) from one measurement data group at measurement objective points (bi) (i=0, 1, 2...). The straightness shape of the object 1 of measurement is grasped in detail from the straightness errors at couples of measurement objective points. |
