| 摘要 |
PURPOSE:To take a high-precision measurement without contacting by projecting a pattern from slantingly above the surface of a body to be measured, forming a light section line which sections the image into a light and a dark part from the projection of a straight line part, and calculating surface roughness of the objective body from its shape. CONSTITUTION:A light source 20 is powered on by an illumination power source 32 to transmit light through a fiber bundle 21. Further, the light is collimated by a lens 22 to form an image of a semicircular pattern 23 on the surface 12 of the objective body through an objective lens 24. The light section line which sections the image on the surface 12 into the light part and dark part is enlarged through the objective lens 24 and a lens 25 and made incident to a photodetecting element 29 through a multifiber sensor 26. Then, the signal is amplified by an amplifier 30 and recorded on a recorder 31. The objective body is moved by lateral jogging mechanism 34 and vertical jogging mechanism 35. Consequently, the roughness of the surface 12 of the objective body is measured continuously without contacting. |
