| 摘要 |
PURPOSE:In a molecular-beam apparatus for crystal growth, to reduce an amount of released gas of impurity, by providing a heat reflector of molecular- beam generating cell with a forcedly cooling means. CONSTITUTION:The heater 6 (the heater support 13) is set at the outside of the crucible 7 put in the molecular-beam raw material 10, and the heat reflector 12 is set at the outside of the heater to constitute a molecular-beam generating cell of molecular-beam apparatus for crystal growth (the thermocouple 8, and the thermocouple protector 9). The heat reflector 12 of the cell has a cylindrical double structure with a bottom, and has the feed pipe 18 for cooling medium and the discharge pipe 19 for the cooling medium at the bottom 23, and the heat reflector 12 is forcedly cooled by the cooling medium 16 circulating through the double pipe. Prefereably the inner face 17 of the reflector is provided with a heat reflecting film consisting of a metal (oxide, nitride) having high reflectance. |
