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发明名称
Verfahren zum Zerlegen einer Halbleiterscheibe in Einzelsysteme
摘要
申请公布号
DE1427770(A1)
申请公布日期
1968.12.12
申请号
DE19641427770
申请日期
1964.06.12
申请人
TELEFUNKEN PATENTVERWERTUNGS GMBH
发明人
KLOSSIKA,WALTER;REINHARDT,GEORG
分类号
H01L21/302;H01L21/304
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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