| 摘要 |
PURPOSE:To heat uniformly a sample on a substrate holder by placing plural temp. sensors among the lines of plural heaters arranged in the holder so as to control separately the heaters. CONSTITUTION:Plural heaters 30a-30i are arranged in a substrate holder 22 set in a vacuum vessel 21 in the diametral direction of the holder 22 at intervals. Plural temp. sensors 31a, 31b are placed among the lines of the heaters 30a-30i, and the leads 33a, 33b, 35a, 35b of the heaters 30a-30i and the sensors 31a, 31b are taken out of the vessel 21 through the rotating shaft 25 of the holder 22. The heaters 30a-30i are separately controlled, and the sample on the holder 22 is uniformly heated. |
