发明名称 An ellipsometer.
摘要 <p>Light from a light source is applied to a specimen after polarization, and the emergent light from the specimen is measured by an analyzer and a detector, the light to be measured passing through a spectroscope disposed in the optical path between the light source and the detector.</p>
申请公布号 EP0144115(A2) 申请公布日期 1985.06.12
申请号 EP19840303871 申请日期 1984.06.07
申请人 TOHOKU UNIVERSITY 发明人 YAMAMOTO, MASAKI
分类号 G01J4/04;G01J4/00;G01N21/21;(IPC1-7):G01N21/21;G01B11/06 主分类号 G01J4/04
代理机构 代理人
主权项
地址