| 摘要 |
<p>PURPOSE:To enable to repaste a pellet from a dicing sheet to a mounting sheet in an excellent transfer-efficient manner by a method wherein the dicing sheet is placed on the mounting sheet with pellet surface facing downward, and the back side of the dicing sheet is uniformly pressed by a press-plate which is pressurized downward by air pressure applied from above. CONSTITUTION: As a stage 21 is heated up by a heater 22, the temperature of a mounting sheet 15 is also raised. The dicing sheet 13 cut off from a stretching ring is placed on the mounting sheet 15 facing downward. A press-plate 24 is lowered at the speed of 10-30mm./sec. by introducing the compressed air of the air pressure of 3-8kg/cm<2> for example. As a result, a separator 27 comes in contact with the back side of the dicing sheet 13, and it is uniformly pressed for 2-5sec.</p> |
