| 摘要 |
A method for coating quartz with a protective boron nitride film constitutes heating the quartz member to a temperature of 900 DEG C. to 1000 DEG C. in a stream of inert gas. After heating the quartz member to the desired temperature, the flow of inert gas is discontinued, whereupon ammonia and diborane gases, mixed at a temperature of 200 DEG C. to 400 DEG C., are allowed to flow past the quartz member. The flow of mixed ammonia and diborane gases is maintained for a time sufficient to deposit a boron nitride film of desired thickness. The boron nitride is produced by chemical reaction between ammonia and diborane.
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