| 摘要 |
PCT No. PCT/DE81/00228 Sec. 371 Date Sep. 17, 1982 Sec. 102(e) Date Sep. 17, 1982 PCT Filed Dec. 18, 1981 PCT Pub. No. WO82/03458 PCT Pub. Date Oct. 14, 1982.A thin-film strain gauge and a method for producing it are proposed; the strain gauge is advantageously capable of integration into a thin-film circuit. The strain gauge comprises an elastically deformable spring element in combination with at least one elongation-sensitive resistor. The resistor disposition (R1-R4), the low-impedance connections (L11-L42) between the various resistance regions and the associated connection tracks (L5-L8) are applied in a vacuum process, preferably by cathode sputtering. The low-impedance connections (L11-L42) and the connection tracks (L5-L8) are of material which, although different from the material making up the actual resistance region, still has approximately the same temperature coefficient of resistance, so as to preclude errors caused by temperature.
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