发明名称 |
Thin films of mixed metal compounds |
摘要 |
A compositionally uniform thin film of a mixed metal compound is formed by simultaneously evaporating a first metal compound and a second metal compound from independent sources. The mean free path between the vapor particles is reduced by a gas and the mixed vapors are deposited uniformly. The invention finds particular utility in forming thin film heterojunction solar cells.
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申请公布号 |
US4523051(A) |
申请公布日期 |
1985.06.11 |
申请号 |
US19830536395 |
申请日期 |
1983.09.27 |
申请人 |
THE BOEING COMPANY |
发明人 |
MICKELSEN, REID A.;CHEN, WEN S. |
分类号 |
H01L31/0224;H01L31/032;H01L31/0336;H01L31/072;(IPC1-7):H01L31/06;H01L31/18 |
主分类号 |
H01L31/0224 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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