发明名称 Thin films of mixed metal compounds
摘要 A compositionally uniform thin film of a mixed metal compound is formed by simultaneously evaporating a first metal compound and a second metal compound from independent sources. The mean free path between the vapor particles is reduced by a gas and the mixed vapors are deposited uniformly. The invention finds particular utility in forming thin film heterojunction solar cells.
申请公布号 US4523051(A) 申请公布日期 1985.06.11
申请号 US19830536395 申请日期 1983.09.27
申请人 THE BOEING COMPANY 发明人 MICKELSEN, REID A.;CHEN, WEN S.
分类号 H01L31/0224;H01L31/032;H01L31/0336;H01L31/072;(IPC1-7):H01L31/06;H01L31/18 主分类号 H01L31/0224
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