| 摘要 |
PURPOSE:To enable easily inserting a carrier into a specific processing chamber by a small and simple mechanism and contrive improvement of operation by making a supporting link which is provided with a holder which holds the carrier freely inclinable. CONSTITUTION:The inlet 33 of a processing chamber 32 which has an internally inclined carrier support shelf 31 is installed adjacent to a front leg 21 to carry out inserting and taking out operations of a carrier 29. At first, a supporting link 20 is pushed out by a pushing mechanism, the front leg 21 and a rear leg 22 are bent with the fulcrums of joints 23, 24 and the supporting link 20 is made an inclined state. The inclined angle alpha of the supporting link 20 is made equal to the inclined angle beta of the carrier support shelf 31 in the processing chamber 32 and both the supporting plane of the supporting link 20 and the supporting plane of the carrier support shelf 31 are made a nearly equal plane. Then, the holder 26 of an arm 27 which holds the carrier 29 is moved forward along a guide bar 25 and inserted into the processing chamber 32. |
